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Physical Layout Design of Directed Self-Assembly Guiding Alphabet for IC Contact Hole/via Patterning.
H.-S. Philip Wong
He Yi
Maryann C. Tung
Kye Okabe
Published in:
ISPD (2015)
Keyphrases
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physical layout
optimal design
design patterns
design process
building blocks
design decisions
integrated circuit
conceptual framework
computer aided
real world
multiresolution
user interface
relational databases
multiscale
face recognition
case study
machine learning