Distribution-guided heuristic search for nonlinear parameter estimation with an application in semiconductor manufacturing.
Hyungjin KimChuljin ParkYoonshik KangPublished in: IISE Trans. (2020)
Keyphrases
- heuristic search
- parameter estimation
- semiconductor manufacturing
- state space
- maximum likelihood
- search algorithm
- model selection
- search space
- least squares
- process control
- planning problems
- markov random field
- em algorithm
- parameter estimation algorithm
- random fields
- maximum likelihood estimates
- automated planning
- beam search
- state space search
- bidirectional search
- production system
- search problems
- path finding
- orders of magnitude
- expectation maximization
- pattern databases
- heuristic function
- heuristic search algorithms
- estimation problems
- probability distribution
- real time
- machine learning
- probabilistic model
- computational intelligence
- optimal planning
- parameter estimates
- random variables
- model fitting