Multitask learning for virtual metrology in semiconductor manufacturing systems.
Chan Hee ParkYounghoon KimYoungjoon ParkSeoung Bum KimPublished in: Comput. Ind. Eng. (2018)
Keyphrases
- manufacturing systems
- multitask learning
- gaussian processes
- multi task
- learning tasks
- multi task learning
- petri net
- complex systems
- manufacturing environment
- holonic manufacturing systems
- process control
- gaussian process
- high order
- em algorithm
- theoretical analysis
- semi supervised learning
- human pose
- labeled data
- machine learning