Impedance matching controller for an inductively coupled plasma chamber - L-type matching network automatic controller.
Giorgio BacelliJohn V. RingwoodPetar IordanovPublished in: ICINCO-SPSMC (2007)
Keyphrases
- matching algorithm
- control system
- feature matching
- real time
- control algorithm
- control method
- communication networks
- closed loop
- image matching
- keypoints
- feature points
- peer to peer
- control scheme
- nonlinear systems
- multiple types
- controller design
- matching process
- computer networks
- optimal control
- shape matching
- network traffic
- pattern matching
- image sequences
- social networks
- neural network