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-Si microstructures.
Elena Atanassova
Raisa V. Konakova
Vadym Fedorovych Mitin
J. Koprinarova
O. S. Lytvym
O. B. Okhrimenko
V. V. Schinkarenko
D. Virovska
Published in:
Microelectron. Reliab. (2005)
Keyphrases
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