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Design and control of a MEMS nanopositioner with bulk piezoresistive sensors.
Mohammad Maroufi
Yuen Kuan Yong
S. O. Reza Moheimani
Published in:
CCA (2015)
Keyphrases
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case study
design process
design principles
control system
multi sensor
design decisions
robot control
control program
mechanical systems
database
evolutionary algorithm
sensor networks
engineering design
design methodology