Optimization of the Deposition Condition for Improving the Ti Film Resistance of DRAM Products.
Yun-Wei LinChia-Ming LinPublished in: SGIoT (2020)
Keyphrases
- optimization algorithm
- data sets
- global optimization
- main memory
- optimization method
- permalloy films
- optimization process
- sufficient conditions
- optimization problems
- input output
- thin film
- database
- management system
- evolutionary algorithm
- optimization methods
- case study
- production line
- discrete optimization
- neural network
- rf sputtering