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Integrated Circuits as Key Enabler for today's Smart MEMS Sensors.
Dirk Droste
Horst Symanzik
Timo Gießelmann
Markus Ulm
Ivano Galdi
Riccardo Campagna
Published in:
ESSCIRC (2022)
Keyphrases
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integrated circuit
sensor networks
real time
electron beam
data sets
sensor data
data fusion
world wide
multi sensor
smart environments
home environments