Evaluation of Alarm System Performance and Management in Semiconductor Manufacturing.
Mohammed Al-KharazBouchra AnanouMustapha OuladsineMichel CombalJacques PinatonPublished in: CoDIT (2019)
Keyphrases
- semiconductor manufacturing
- discrete event simulation
- process control
- management system
- decision support
- data processing
- evaluation method
- databases
- decision making
- database
- network management
- evaluation criteria
- evaluation model
- production system
- comparative evaluation
- evaluation measures
- knowledge base
- information systems
- real world
- data sets