27.2 A1.2μg/√Hz-resolution 0.4μg-bias-instability MEMS silicon oscillating accelerometer with CMOS readout circuit.
Xi WangJian ZhaoYang ZhaoGuo Ming XiaAn Ping QiuYan SuYong Ping XuPublished in: ISSCC (2015)
Keyphrases
- high speed
- cmos technology
- low power
- high frame rate
- metal oxide semiconductor
- silicon on insulator
- circuit design
- analog vlsi
- low voltage
- frame rate
- high resolution
- low cost
- delay insensitive
- focal plane
- power dissipation
- activity recognition
- low resolution
- gesture recognition
- parallel processing
- real time
- power consumption
- logic circuits
- sampling rate
- charge coupled device