A Virtual Metrology system for predicting CVD thickness with equipment variables and qualitative clustering.
Gian Antonio SustoAlessandro BeghiCristina De LucaPublished in: ETFA (2011)
Keyphrases
- k means
- clustering method
- clustering algorithm
- hierarchical clustering
- data clustering
- process control
- unsupervised learning
- virtual reality
- augmented reality
- camera calibration
- single view
- graph theoretic
- cluster analysis
- information theoretic
- qualitative reasoning
- clustering analysis
- qualitative simulation
- qualitative information
- data sets
- conditional dependence
- qualitative and quantitative
- document clustering
- self organizing maps
- virtual world
- data points
- image segmentation
- computer vision
- neural network