Indicator of Alarm Risk on Product Degradation, Prediction for Alarms Grouping, Using Alarms Data in Semiconductor Manufacturing.
Mohammed Al-KharazBouchra AnanouMustapha OuladsineMichel CombalJacques PinatonPublished in: CDC (2019)
Keyphrases
- data sets
- high quality
- data analysis
- raw data
- data sources
- data collection
- database
- data points
- semiconductor manufacturing
- experimental data
- synthetic data
- data processing
- input data
- image data
- prior knowledge
- training data
- prediction accuracy
- knowledge discovery
- original data
- simulation model
- predictive model
- correlation analysis
- product information
- data mining