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Axial Displacement Measurement of a Single-Crystal Actuator Using Phase-Shift Interferometry.

Kee S. MoonMiguel LevyYong K. HongHeung K. Park
Published in: IEEE Trans. Ind. Electron. (2005)
Keyphrases
  • phase shift
  • closed loop
  • real time
  • databases
  • control system
  • neural network
  • phase unwrapping
  • measurement model
  • decision trees
  • case study
  • multiresolution
  • data acquisition
  • control method
  • waveguide