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Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors.
Bolun Tang
Yunbo Shi
Jianwei Li
Jie Tang
Qiaohua Feng
Published in:
Sensors (2022)
Keyphrases
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high temperature
simulation environment
genetic algorithm
design process
real time
case study
data streams
control system
wireless sensor networks
high speed
simulation model
electro mechanical systems