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Recent advances in semiconductor factory automation, part 2: equipment-level automation.

MuDer JengMengchu ZhouThomas Wen-Yao Chen
Published in: IEEE Robotics Autom. Mag. (2004)
Keyphrases
  • recent advances
  • researchers and practitioners
  • recent developments
  • neural network
  • higher level
  • field of pattern recognition
  • image processing
  • manufacturing systems
  • production line