A CMOS-MEMS Pressure Sensor with Integrated Front-End for Chemical Vapor Deposition Systems.

Tsung-Heng Tsai Song-You Hong

Published in: SENSORS (2023)

Keyphrases

management system
complex systems
building blocks
image sensor
sensor networks
multi sensor
intelligent systems
computer systems
omnidirectional vision
real time
high density
back end
infrared
learning systems
data management
low cost
expert systems
image sequences
neural network