On the energy-optimal precise wafer stage positioning: Equivalence with minimal time optimality.

Ilya Ioslovich Shai Moshenberg Per-Olof Gutman

Published in: ISIE (2015)

Keyphrases

optimal solution
minimum energy
optimal design
upper bound
database
data sets
case study
data streams
dynamic programming
worst case
energy consumption
closed form
integrated circuit
equivalence relation
semiconductor manufacturing
asymptotic optimality