Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor.

Grace M. Kepler H. T. Banks Hien T. Tran S. C. Beeler

Published in: SIAM J. Appl. Math. (2002)

Keyphrases

thin film
reduced order
control method
kalman filtering
control system
high density
control strategy
short circuit
multi layer
image sequences
optimal control
autonomous robots
solar cell