Particle simulation of a magnetized dual-frequency capacitively coupled plasma.

Daeho Kim Hyonu Chang Chang-Mo Ryu

Published in: Comput. Phys. Commun. (2007)

Keyphrases

low frequency
fluid dynamics
simulation models
thin film
simulation model
simulation study
high frequency
expert systems
multiscale
image sequences
database
high density
artificial intelligence
primal dual
simulation environment
neural network
simulation software
discrete event simulation
high energy
real time