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Feedback control of surface roughness of GaAs (0 0 1) thin films using kinetic Monte Carlo models.
Yiming Lou
Panagiotis D. Christofides
Published in:
Comput. Chem. Eng. (2004)
Keyphrases
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manufacturing process
monte carlo
monte carlo simulation
feedback control
thin film
markov chain
neural network
monte carlo tree search
particle filter
closed loop
room temperature
real time
viewpoint
complex systems
optimal control