An Automatic Calibration Method for Kerf Angle in Wafer Automated Optical Inspection.

Chao Meng Jinfei Shi Fei Hao Yuan Chao

Published in: IPMV (2021)

Keyphrases

calibration method
camera calibration
field of view
fish eye lenses
multi camera
structured light
focal length
machine learning
optical axis
high quality
high resolution
matching algorithm