Login / Signup
CMOS compatible bulk micromachined silicon piezoresistive accelerometer with low off-axis sensitivity.
S. Kal
Soumen K. Das
D. K. Maurya
Kanishka Biswas
Adepu Ravi Sankar
S. K. Lahiri
Published in:
Microelectron. J. (2006)
Keyphrases
</>
high speed
low cost
high sensitivity
cmos technology
low power
real time
power consumption
vlsi circuits
silicon on insulator
sensitivity analysis
gesture recognition
small size
circuit design
silicon dioxide