Evolutionary Optimization for Plasmon-Assisted Lithography.

Caroline Prodhon Demetrio Macías Farouk Yalaoui Alexandre Vial Lionel Amodeo

Published in: EvoWorkshops (2009)

Keyphrases

evolutionary optimization
multi objective
genetic optimization
genetic algorithm
constraint handling
electron beam
fuzzy modeling
structural design
optimization algorithm
real time
machine learning
objective function
data analysis
expert systems
evolutionary algorithm
differential evolution