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Lift-out techniques coupled with advanced TEM characterization methods for electrical failure analysis.
N. Bicaïs-Lépinay
F. André
R. Pantel
S. Jullian
Alain Margain
L. F. Tz. Kwakman
Published in:
Microelectron. Reliab. (2002)
Keyphrases
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statistical analysis
significant improvement
computational cost
statistical methods
learning algorithm
benchmark datasets
quantitative analysis
databases
case study
image segmentation
three dimensional
empirical studies
machine learning algorithms
cross validation