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Effect of Crystal Structure on Fabrication of Fine Periodic Surface Structures with Short Pulsed Laser.
Shuhei Kodama
Shinya Suzuki
Akihiro Shibata
Keita Shimada
Masayoshi Mizutani
Tsunemoto Kuriyagawa
Published in:
Int. J. Autom. Technol. (2018)
Keyphrases
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d objects
complex structures
three dimensional
hierarchical structure
geometric structure
hierarchical structures
structural information
high speed
image structure
surface reconstruction
integrated circuit