A Highly accurate method to calculate capacitance of MEMS sensors with circular membranes.
Mosaddequr RahmanSazzadur ChowdhuryPublished in: EIT (2009)
Keyphrases
- highly accurate
- experimental evaluation
- high accuracy
- high precision
- capable of producing
- pairwise
- significant improvement
- detection method
- high quality
- classification method
- clustering method
- theoretical analysis
- prior knowledge
- preprocessing
- computationally efficient
- high speed
- edge detection
- classification accuracy
- synthetic data
- multiresolution
- fully automatic
- data sets