Lithographic Hotspot Detection Using Adaptive Squish Pattern Sampling Combined with Faster R-CNN.
Jian CuiJian ZhangXuexiang WangPublished in: ASICON (2023)
Keyphrases
- pattern detection
- adaptive sampling
- object detection
- anomaly detection
- detection algorithm
- detection method
- pattern matching
- automatic detection
- real time
- detection accuracy
- change detection
- detection rate
- sample size
- combining multiple
- cellular neural networks
- sampling strategies
- convolutional neural network
- detection scheme
- early warning
- false alarms
- multiscale
- image processing
- feature selection