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DeepSEM-Net: Enhancing SEM defect analysis in semiconductor manufacturing with a dual-branch CNN-Transformer architecture.
Yibo Qiao
Zhouzhouzhou Mei
Yuening Luo
Yining Chen
Published in:
Comput. Ind. Eng. (2024)
Keyphrases
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semiconductor manufacturing
data analysis
image analysis
database
information retrieval
computer vision
image processing
face recognition
feature extraction
control system
fuzzy logic
fault diagnosis
process control