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Material handling: operational modeling and simulation of an inter-bay AMHS in semiconductor wafer fabrication.
Jesus A. Jimenez
Bosun Kim
John W. Fowler
Gerald T. Mackulak
You In Choung
Dong-Jin Kim
Published in:
WSC (2002)
Keyphrases
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wafer fabrication
material handling
production line
simulation model
manufacturing environment
mathematical model
cyclic scheduling
real time
genetic algorithm
decision making
special case
knowledge representation
computer graphics
modeling method
simulation models