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TCAD development for lithography resolution enhancement.

Lars LiebmannScott M. MansfieldAlfred K. WongMark A. LavinWilliam C. LeipoldTimothy G. Dunham
Published in: IBM J. Res. Dev. (2001)
Keyphrases
  • resolution enhancement
  • super resolution
  • low resolution
  • energy minimization
  • visual analysis
  • image resolution