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Design of On-Wafer Calibration Kit for Accurate Pyramid Probe Card-Based Surface Acoustic Wave Filter Measurements.
Abhishek Sahu
John Fendrich
Peter H. Aaen
Published in:
IEEE Trans. Instrum. Meas. (2023)
Keyphrases
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three dimensional
multiresolution
design process
stereo imaging
manufacturing process
semiconductor manufacturing
wave propagation