A Parallel Inverse-Model-Based Iterative Learning Control Method for a Master-Slave Wafer Scanner.
Weike LiuRunze DingXiaofeng YangChenyang DingFeng ShuPublished in: IECON (2020)
Keyphrases
- master slave
- control method
- iterative learning
- trajectory tracking
- control algorithm
- iterative learning control
- control strategy
- pid controller
- adaptive control
- control system
- incremental learning
- fuzzy control
- grey prediction
- error reduction
- fuzzy pid control
- lyapunov function
- fuzzy controller
- matlab simulink
- dc dc converter
- dynamic model
- manufacturing systems
- closed loop