The Detection and the control of Machine/Chamber Mismatching in Semiconductormanufacturing.
Aabir ChouichiJakey BlueClaude YugmaFrançois PasqualiniPublished in: WSC (2018)
Keyphrases
- automatic detection
- diesel engine
- control system
- detection algorithm
- object detection
- false alarms
- false positives
- detection scheme
- machine learning
- control theory
- detection accuracy
- control method
- detection rate
- detection method
- anomaly detection
- computer vision
- change detection
- intrusion detection
- special case
- control problems
- robot control
- vehicle detection
- information retrieval
- automated detection
- neural network