Process monitoring through wafer-level spatial variation decomposition.

Ke Huang Nathan Kupp John M. Carulli Jr.Yiorgos Makris

Published in: ITC (2013)

Keyphrases

higher level
decomposition method
decision trees
levels of abstraction
lower level
spatial information
space time
image classification
semiconductor manufacturing
spatial temporal
database
spatio temporal
video sequences
optimal solution
multiscale
high level
machine learning
neural network