A layout dependent full-chip copper electroplating topography model.
Jianfeng LuoQing SuCharles C. ChiangJamil KawaPublished in: ICCAD (2005)
Keyphrases
- experimental data
- statistical model
- theoretical framework
- decision trees
- data sets
- formal model
- neural network model
- conceptual model
- computational model
- low cost
- prior knowledge
- feature selection
- real time
- probability distribution
- probabilistic model
- objective function
- process model
- similarity measure
- high level
- neural network