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Time-Optimal Temperature Control via Binary Search in Semiconductor Vertical Furnace.

Christian Milleneuve BudionoWataru OhnishiTakafumi KosekiAkira HirataRyosuke ShibatsujiTatsuya Yamaguchi
Published in: IECON (2023)
Keyphrases
  • binary search
  • temperature control
  • control algorithm
  • neural network
  • objective function
  • optimal control