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Effects of length scaling on electromigration in dual-damascene copper interconnects.

M. H. LinM. T. LinTahui Wang
Published in: Microelectron. Reliab. (2008)
Keyphrases
  • integrated circuit
  • input output
  • image processing
  • machine learning
  • negative effects
  • learning environment
  • evolutionary algorithm
  • thin film
  • printed circuit boards