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A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control.
Mohammad Maroufi
Ali Bazaei
S. O. Reza Moheimani
Published in:
IEEE Trans. Control. Syst. Technol. (2015)
Keyphrases
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high bandwidth
high density
end to end
low latency
low cost
mobile terminals