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A novel packaging stress isolation structure for SOI based MEMS gyroscopes.

Yongcun HaoWeizheng YuanJianbing XieHonglong Chang
Published in: IEEE SENSORS (2016)
Keyphrases
  • structural information
  • data sets
  • image processing
  • high speed
  • high density
  • databases
  • real world
  • information retrieval
  • genetic algorithm
  • clustering algorithm