Cyclic scheduling of cluster tools with non-identical chamber access times.

Dae-Kyu Kim Chihyun Jung Tae-Eog Lee Yu-Ju Jung

Published in: WSC (2011)

Keyphrases

cyclic scheduling
access control
clustering algorithm
digital resources
data stores
data points
software tools
special case
data clustering
computer aided
web interface
quality control
cluster analysis
real time
knowledge discovery
computational complexity
artificial intelligence