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Quantitative assessment of subsurface damage depth in silicon wafers based on optical transmission properties.

J. M. ZhangJ. G. Sun
Published in: Int. J. Manuf. Technol. Manag. (2005)
Keyphrases
  • qualitative and quantitative
  • low cost
  • electron beam
  • real time
  • steady state
  • desirable properties
  • data transmission