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Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N$_2$ discharges on experimental timescales.
Tobias Gergs
Thomas Mussenbrock
Jan Trieschmann
Published in:
CoRR (2023)
Keyphrases
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thin film
artificial neural networks
film thickness
neural network
artificial intelligence
multi layer
computer science
high density
low cost
magnetic field
short circuit
machine learning
augmented reality
white light interferometry