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A soft sensor for the surface cleanliness level of ultra-smooth optical component based on the Genetic-algorithm and the Related Vector Machine.

Xue WangZhijiang XieChangchun Liu
Published in: IEEE ICCI (2009)
Keyphrases
  • genetic algorithm
  • soft sensor
  • smooth surfaces
  • light scattering
  • industrial process
  • neural network
  • closely spaced
  • multi objective
  • d objects
  • high speed
  • data mining
  • fitness function
  • smoothness constraint