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Achieving Optimal Cycle Time Improvement in a 300-mm Semiconductor Fab Using Dynamic Simulation and Design of Experiments.
Dominique Mercier
Olivier Bonnin
Philippe Vialletelle
Published in:
Simul. (2003)
Keyphrases
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optimal design
simulation environment
design process
simulation software
significant improvement
closed form
real time
user interface
dynamic programming
worst case
knowledge based systems
building blocks
computer aided
simulation model