Simulation and research on the automatic leveling of a precision stage.

Yongsheng Liu Suping Fang Hisashi Otsubo Tsuneto Sumida

Published in: Comput. Aided Des. (2013)

Keyphrases

data driven
fully automatic
simulation models
mathematical model
simulation software
databases
learning algorithm
metadata
precision and recall
simulation model
simulation environment
high fidelity