Machine Learning-Based Wheel Monitoring for Sapphire Wafers.
Yu-Kun LinBing-Fei WuPublished in: IEEE Access (2021)
Keyphrases
- machine learning
- monitoring system
- real time
- pattern recognition
- integrated circuit
- data mining
- machine learning and data mining
- text classification
- semiconductor manufacturing
- learning algorithm
- artificial intelligence
- decision trees
- explanation based learning
- machine learning approaches
- computational biology
- condition monitoring
- inductive learning
- machine learning methods
- neural network
- knowledge acquisition
- computational intelligence
- computer vision
- unsupervised learning
- decision support
- statistical methods
- kernel methods
- learning tasks
- statistical learning
- supervised learning
- information extraction
- knowledge discovery
- knowledge representation
- health monitoring
- genetic algorithm