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Progressive Hierarchical Deep Reinforcement Learning for defect wafer test.
Meng Xu
Xinhong Chen
Yechao She
Jianping Wang
Published in:
Knowl. Based Syst. (2024)
Keyphrases
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reinforcement learning
state space
coarse to fine
defect detection
learning algorithm
information systems
dynamic programming
function approximation
search engine
multi agent
learning process
probabilistic model
hierarchical structure
reinforcement learning algorithms