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An Automatic Optical Simulation-Based Lithography Hotspot Fix Flow for Post-Route Optimization.
Yang-Shan Tong
Sao-Jie Chen
Published in:
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2010)
Keyphrases
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route optimization
electron beam
routing problem
mobile ip
quality of service
distribution network
real time