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An Automatic Optical Simulation-Based Lithography Hotspot Fix Flow for Post-Route Optimization.

Yang-Shan TongSao-Jie Chen
Published in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2010)
Keyphrases
  • route optimization
  • electron beam
  • routing problem
  • mobile ip
  • quality of service
  • distribution network
  • real time