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Semiconductor Equipment Health Monitoring With Multi-View Data.

Jeongsun AhnHong-Yeon KimSang-Hyun ChoHyun-Jung KimHongyeon KimHyeonjeong ChoiDain Ham
Published in: WSC (2023)
Keyphrases
  • multi view
  • sensor data
  • high quality
  • data points
  • human computer interaction
  • multiple views
  • health monitoring
  • single view
  • feature selection
  • three dimensional