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The effects of poly-SiGe on sensing properties for ultra-low-power CMOS-embedded MEMS sensors.
Yoshihiko Kurui
Hideyuki Tomizawa
Akira Fujimoto
Tomohiro Saito
Akihiro Kojima
Tamio Ikehashi
Yoshiaki Sugizaki
Hideki Shibata
Published in:
IEEE SENSORS (2017)
Keyphrases
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ultra low power
sensor networks
image sensor
low power
micro controller
sensor fusion
real time
data acquisition
high speed
power consumption
low cost
data fusion
digital camera
sensing devices
multi sensor
desirable properties
everyday objects
analog to digital converter